MF138800 - SEMI MF1388 - Test Method for Generation Lifetime and Generation Velocity of Silicon Material by Capacitance-Time Measurements of Metal-Oxide-Silicon (MOS) Capacitors Revision:SEMI MF1388-1106 - Superseded providing particle control as risk

providing particle control as risk mitigation for particle contamination on the wafer

It assumes the existence of terminology described in other SEMI Flat Panel Display Documents

SEMI C28 — Specifications for Hydrofluoric Acid

2 Ωcm for n-type silicon (refer to SEMI MF43)

and gain a consistent understanding within

MF138800 - SEMI MF1388 - Test Method for Generation Lifetime and Generation Velocity of Silicon Material by Capacitance-Time Measurements of Metal-Oxide-Silicon (MOS) Capacitors Revision:SEMI MF1388-1106 - Superseded providing particle control as riskThis Test Method covers the measurement of generation lifetime and generation velocity of silicon wafers. The measurement requires the fabrication of a guard ring MOS capacitor (refer to Figure 1). This Test Method is therefore destructive to the silicon wafer. This test may also be applied to semiconductor materials other than silicon and to insulators other than silicon dioxide, but the details of capacitor fabrication and the analyses and